Model R4000 Series Remote Airborne Particle Counters
Remotely
count 0.10 µm particles
RS485 serial communications
Product yield now demands cleaner manufacturing environments, and the monitoring of particulate contamination. The Met One R4000 and R4300 Remote Particle Counters detect, size, and count particles down to 0.10µm diameters. The R4000 samples from a single line (tube) at 1.0cfm (cubic feet per minute). The R4300 simultaneously samples from three lines at cfm from each line, lowering the cost per sampling location. Each location has a unique "address"/location. Along with several easy methods of connecting multiple R4000/R4300s to your facility monitoring or data acquisition system, these remote sensors are ideal for monitoring contamination at semicoductor wafer handling and process equipment. Typically, these sensors are used in Class 1000 (at 0.5 micron) or cleaner areas. Met One, along with our Pacific Scientific Service Group and our international agents, provide installation, training, service, and technical support for all of your particle counting needs.
| Pin # | RS485 |
| 1 | ground |
| 2 | alarm, open drain FET |
| 3 | no connection |
| 4 | no connection |
| 5 | no connection |
| 6 | RS485A |
| 7 | no connection |
| 8 | RS485B |
| 9 | no connection |
| 10 | no connection |
| 11 | no connection |
| 12 | no connection |
| 13 | analog ground |
| 14 | shield (RS485) |
| 15 | +5/12V output (selectable) |
Specifications
| Sizes Counted | 0.10 and 0.30 micron, standard (other sizes available up to 1.0 micron, consult factory) |
| Sample Flow Rate | 1.0 cubic foot per minute (28.3 liters per minute) (R4300 samples three lines at 0.33 cfm per line) |
| Data Communication | RS485 serial, standard (two count channels/address location, status byte) |
| Light Source (Sensor) | HeNe laser, open cavity |
| Zero Count | <1 count/15 minutes |
| Vacuum Requirements | 18" Hg minimum at 1.1cfm |
| Clean Dry Air (CDA) Purge | 125 psig, maximum |
| Power Requirements | 100VAC-240VAC, 50/60Hz; 500mA, max., 50watts, max. |
| Dimensions | 8.3" (wide) x 7" (height) x 22.5" (depth), 21cm (W) x 17.7cm (H) x 57.1cm (D) |
| Weight | 18 lbs. (8.2 kg) |
Ordering
Guide
When ordering, please
specify:
Model R4000 or R4300
Size Channels (0.10, 0.30µm,
standard)